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A sensitive photoacoustic detection approach employing a silicon cantilever is investigated for power measurement of electromagnetic radiation. The technique which is actuated by pressure waves generated through radiation-induced heat depicts high sensitivity for a considerably large spectral range from 325 nm to 1523 nm. The implemented method shows linear response in the measurement of radiation power from 15 nW to 6 mW demonstrating a dynamic range of almost six orders of magnitude. A numerical model has been developed to analyze and optimize the measurement sensitivity. The model allows studying different dimensions of the cantilever which is one of the key components of the radiation detection process. The numerical results are in good agreement with experimental results. The electromagnetic power detection technique shows future potential for industrial applications and scientific studies.
- Cantilever pressure sensor
- Optical metrology
- Photoacoustic numerical model
- Radiation detection
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