Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

9 Citations (Scopus)
316 Downloads (Pure)

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