Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin

Research output: Other contributionProfessional

36 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 2017
MoE publication typeNot Eligible

Publication series

NameScience Letter (Beneq)

Keywords

  • spatial atomic layer deposition
  • nanostructured silicon
  • high surface area
  • surface passivation
  • conformal coating
  • aluminum oxide

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