Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen; Päivikki Repo; Ville Vähänissi; Toni Pasanen; Ville Malinen; Hele Savin

Efficient surface passivation of black silicon using spatial atomic layer deposition

Ismo Heikkinen, Päivikki Repo, Ville Vähänissi, Toni Pasanen, Ville Malinen, Hele Savin

Beneq Oy

Research output: Other contribution › Professional

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Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible

Publication series

Name	Science Letter (Beneq)

Keywords

spatial atomic layer deposition
nanostructured silicon
high surface area
surface passivation
conformal coating
aluminum oxide

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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Science-letter_Heikkinen_SurfacePassivation

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OtaNano
Anna Rissanen (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanofab
Päivikki Repo (Manager)
OtaNano
Facility/equipment: Facility

Cite this

@misc{5cedd1780a4c4dcf9fc1a4b971cd09f3,

title = "Efficient surface passivation of black silicon using spatial atomic layer deposition",

keywords = "spatial atomic layer deposition, nanostructured silicon, high surface area, surface passivation, conformal coating, aluminum oxide",

author = "Ismo Heikkinen and P{\"a}ivikki Repo and Ville V{\"a}h{\"a}nissi and Toni Pasanen and Ville Malinen and Hele Savin",

year = "2017",

language = "English",

series = "Science Letter (Beneq)",

type = "Other",

}

TY - GEN

T1 - Efficient surface passivation of black silicon using spatial atomic layer deposition

AU - Heikkinen, Ismo

AU - Repo, Päivikki

AU - Vähänissi, Ville

AU - Pasanen, Toni

AU - Malinen, Ville

AU - Savin, Hele

PY - 2017

Y1 - 2017

KW - spatial atomic layer deposition

KW - nanostructured silicon

KW - high surface area

KW - surface passivation

KW - conformal coating

KW - aluminum oxide

M3 - Other contribution

T3 - Science Letter (Beneq)

ER -

Efficient surface passivation of black silicon using spatial atomic layer deposition

Publication series

Keywords

UN SDGs

Access to Document

OpenUrl availability

Equipment

OtaNano

OtaNano - Nanofab

Cite this