Efficient surface passivation of black silicon using spatial atomic layer deposition

Research output: Contribution to specialist publication typesArticleProfessional

2 Downloads (Pure)
Original languageEnglish
Specialist publicationScience Letter (Beneq)
Publication statusPublished - 2017
MoE publication typeNot Eligible

Keywords

  • spatial atomic layer deposition
  • nanostructured silicon
  • high surface area
  • surface passivation
  • conformal coating
  • aluminum oxide

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