Effects on intermediate zinc pulses on properties of TiN and Nbn films deposited by atomic layer epitaxy

M. Ritala, T. Asikainen, M. Leskelä, J. Jokinen, R. Lappalainen, M. Utriainen, L. Niinistö, E. Ristolainen

    Research output: Contribution to journalArticle

    47 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)199-212
    JournalApplied Surface Science
    Publication statusPublished - 1997
    MoE publication typeA1 Journal article-refereed


    • atomic layer epitaxy
    • NbN
    • thin film
    • TiN

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