Effects on intermediate zinc pulses on properties of TiN and Nbn films deposited by atomic layer epitaxy

M. Ritala, T. Asikainen, M. Leskelä, J. Jokinen, R. Lappalainen, M. Utriainen, L. Niinistö, E. Ristolainen

    Research output: Contribution to journalArticleScientificpeer-review

    46 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)199-212
    JournalApplied Surface Science
    Volume120
    Publication statusPublished - 1997
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer epitaxy
    • NbN
    • thin film
    • TiN

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