@article{2988bcff982941d3b4c369c7f25a7b36,
title = "Effects of Various Pre-Intrinsic and Phosphorus Diffusion Gettering Effects Upon Quality of Czochralski Silicon Wafer Surface during a Simulated 4 Megabit Dynamic Random Acces Memory Process",
keywords = "gettering, silicon processing, synchrotron radiation, gettering, silicon processing, synchrotron radiation, gettering, silicon processing, synchrotron radiation",
author = "Jari Partanen and T. Tuomi and D-Y. Yang and H.G. Lee and O.H. Kim and Sookap Hahn",
year = "1992",
language = "English",
volume = "139",
pages = "1431--1437",
journal = "Journal of the Electrochemical Society",
issn = "1945-7111",
publisher = "Electrochemical Society",
}