Effects of Surface Treatments on the Adhesion Between a Multifunctional Photoresist and Cu and Cr/Cu Metallizations

Jun Ge, Jorma K. Kivilahti

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)3007
    JournalJournal of Applied Physics
    Volume92
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • adhesion
    • multifunctional photoresist
    • surface treatment

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