@techreport{faaba2a1f5214a1aa78366b856bdf5e2,
title = "Effects of fabrication parameters on porous p+-type silicon morphology",
keywords = "humidity sensor, morphology, porous silicon, humidity sensor, morphology, porous silicon, humidity sensor, morphology, porous silicon",
author = "J. Salonen and M. Bj{\"o}rkqvist and E. Laine and L. Niinist{\"o}",
year = "2000",
language = "English",
series = "Second International Conference on Porous Semiconductors, Madrid, Spain, March 12-17, 2000",
publisher = "Technical University of Valencia and Madrid Autonomous University",
pages = "p. P2--33",
type = "WorkingPaper",
institution = "Technical University of Valencia and Madrid Autonomous University",
}