Effects of atomic layer deposited thin film cladding on silicon slot waveguides

Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationOIE'11 - The Ninth Japan-Finland Joint Symposium on Optics in Engineering, Turku , Finland, September 8 - 10, 2011
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication

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