Effective passivation of black silicon surfaces by atomic layer deposition

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Original languageEnglish
Pages (from-to)90-94
JournalIEEE Journal of Photovoltaics
Volume3
Issue number1
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

    Research areas

  • aluminum oxide, atomic layer deposition, black silicon, nanostructures

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