Effective passivation of black silicon surfaces by atomic layer deposition

Päivikki Repo, Antti Haarahiltunen, Lauri Sainiemi, Marko Yli-Koski, Heli Talvitie, Martin Schubert, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

98 Citations (Scopus)
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