Effective passivation of black silicon surfaces by atomic layer deposition

Päivikki Repo, Antti Haarahiltunen, Lauri Sainiemi, Marko Yli-Koski, Heli Talvitie, Martin Schubert, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

73 Citations (Scopus)
70 Downloads (Pure)
Original languageEnglish
Pages (from-to)90-94
JournalIEEE Journal of Photovoltaics
Volume3
Issue number1
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Keywords

  • aluminum oxide
  • atomic layer deposition
  • black silicon
  • nanostructures

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