Effect of transition metals on oxygen precipitation in silicon

Heli Talvitie, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin, Juha Sinkkonen

    Research output: Contribution to journalArticleScientificpeer-review

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    Original languageEnglish
    JournalJournal of Physics: Conference Series
    Volume100
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

    Keywords

    • oxygen
    • silicon
    • transition metals

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