Effect of transition metals on oxygen precipitation in silicon

Heli Talvitie; Antti Haarahiltunen; Marko Yli-Koski; Hele Savin; Juha Sinkkonen

doi:10.1088/1742-6596/100/7/072045

Effect of transition metals on oxygen precipitation in silicon

Heli Talvitie, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin, Juha Sinkkonen

Electron Physics Group (EPG)

Research output: Contribution to journal › Conference article › Scientific › peer-review

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Original language	English
Article number	072045
Journal	Journal of Physics: Conference Series
Volume	100
DOIs	https://doi.org/10.1088/1742-6596/100/7/072045
Publication status	Published - 2008
MoE publication type	A4 Article in a conference publication
Event	International Conference on Nanoscience and Technology - Stockholm, Sweden Duration: 2 Jul 2007 → 6 Jul 2007

Keywords

oxygen
silicon
transition metals

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10.1088/1742-6596/100/7/072045

savin_effect_of_transition_2008Final published version, 423 KBLicence: CC BY

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Cite this

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title = "Effect of transition metals on oxygen precipitation in silicon",

keywords = "oxygen, silicon, transition metals, oxygen, silicon, transition metals, oxygen, silicon, transition metals",

author = "Heli Talvitie and Antti Haarahiltunen and Marko Yli-Koski and Hele Savin and Juha Sinkkonen",

year = "2008",

doi = "10.1088/1742-6596/100/7/072045",

language = "English",

volume = "100",

journal = "Journal of Physics: Conference Series",

issn = "1742-6588",

publisher = "IOP Publishing Ltd.",

note = "International Conference on Nanoscience and Technology, ICNT ; Conference date: 02-07-2007 Through 06-07-2007",

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TY - JOUR

T1 - Effect of transition metals on oxygen precipitation in silicon

AU - Talvitie, Heli

AU - Haarahiltunen, Antti

AU - Yli-Koski, Marko

AU - Savin, Hele

AU - Sinkkonen, Juha

PY - 2008

Y1 - 2008

KW - oxygen

KW - silicon

KW - transition metals

KW - oxygen

KW - silicon

KW - transition metals

KW - oxygen

KW - silicon

KW - transition metals

U2 - 10.1088/1742-6596/100/7/072045

DO - 10.1088/1742-6596/100/7/072045

M3 - Conference article

VL - 100

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

M1 - 072045

T2 - International Conference on Nanoscience and Technology

Y2 - 2 July 2007 through 6 July 2007

ER -