Effect of transition metals on oxygen precipitation in silicon

Heli Talvitie, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin, Juha Sinkkonen

Research output: Contribution to journalConference articleScientificpeer-review

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Original languageEnglish
Article number072045
JournalJournal of Physics: Conference Series
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Nanoscience and Technology - Stockholm, Sweden
Duration: 2 Jul 20076 Jul 2007


  • oxygen
  • silicon
  • transition metals

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