Effect of thermal history on iron precipitation in crystalline silicon

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Abstract

We have studied the effect of thermal history on iron precipitation behavior in intentionally contaminated Czochralski silicon wafers that contain well-defined precipitation sites for iron, oxide precipitates. Iron precipitation was studied at a temperature range between 600°C and 700°C for various times. The results indicate that iron precipitation is strongly affected by the thermal history of the wafers. Our results also explain the disagreement observed previously in iron precipitation behavior at low temperature anneals. Finally, we discuss how the results can be applied to gettering in multicrystalline silicon.

Details

Original languageEnglish
Pages (from-to)355-359
JournalEnergy Procedia
Volume8
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed
EventInternational Conference on Crystalline Silicon Photovoltaics - Freiburg, Germany
Duration: 17 Apr 201120 Apr 2011
Conference number: 1

    Research areas

  • gettering, iron, precipitation, silicon

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