Effect of the size and reactivity of the metal reactant (MLn) on ALD growth

Riikka Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationAVS Topical Conference on Atomic Layer Deposition (ALD 2002), Seoul, Korea, August 19-21, 2002
    Pages31
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ALE
    • atomic layer deposition ALD
    • modelling

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