Effect of the size and reactivity of the metal reactant (MLn) on ALD growth

Riikka Puurunen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	AVS Topical Conference on Atomic Layer Deposition (ALD 2002), Seoul, Korea, August 19-21, 2002
Pages	31
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{c0033810e94540fbbf3d073cc1ebe9ac,

title = "Effect of the size and reactivity of the metal reactant (MLn) on ALD growth",

keywords = "ALE, atomic layer deposition ALD, modelling, ALE, atomic layer deposition ALD, modelling, ALE, atomic layer deposition ALD, modelling",

author = "Riikka Puurunen",

year = "2002",

language = "English",

pages = "31",

booktitle = "AVS Topical Conference on Atomic Layer Deposition (ALD 2002), Seoul, Korea, August 19-21, 2002",

}

TY - GEN

T1 - Effect of the size and reactivity of the metal reactant (MLn) on ALD growth

AU - Puurunen, Riikka

PY - 2002

Y1 - 2002

KW - ALE

KW - atomic layer deposition ALD

KW - modelling

KW - ALE

KW - atomic layer deposition ALD

KW - modelling

KW - ALE

KW - atomic layer deposition ALD

KW - modelling

M3 - Conference contribution

SP - 31

BT - AVS Topical Conference on Atomic Layer Deposition (ALD 2002), Seoul, Korea, August 19-21, 2002

ER -