Effect of surface on defect creation by self-ion bombardment of Si(001)

J. Tarus, K. Nordlund, A. Kuronen, J. Keinonen

    Research output: Contribution to journalArticleScientificpeer-review

    28 Citations (Scopus)
    Original languageEnglish
    JournalPhysical Review B
    Volume58
    Issue number15
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • computer simulations
    • radiation defects
    • semiconductor materials
    • surfaces

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