Effect of substrate pretreatments on the atomic layer deposited Al2O3 passivation quality

Yameng Bao, Shuo Li, Guillaume von Gastrow, Päivikki Repo, Matti Putkonen, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
134 Downloads (Pure)
Original languageEnglish
Article number01A123
Number of pages4
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume33
Issue number1
DOIs
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

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