| Original language | English |
|---|---|
| Article number | 01A123 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 33 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2015 |
| MoE publication type | A1 Journal article-refereed |
Effect of substrate pretreatments on the atomic layer deposited Al2O3 passivation quality
Yameng Bao, Shuo Li, Guillaume von Gastrow, Päivikki Repo, Matti Putkonen, Hele Savin
Research output: Contribution to journal › Article › Scientific › peer-review
13
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(Scopus)
210
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