Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3

Guillaume von Gastrow, Shuo Li, Matti Putkonen, Mikko Laitinen, Timo Sajavaara, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
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Engineering & Materials Science

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Chemical Compounds