Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Ville Vähänissi; Antti Haarahiltunen; Marki Yli-Koski; H. Talvitie; M. I. Asghar; Hele Savin

Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Ville Vähänissi, Antti Haarahiltunen, Marki Yli-Koski, H. Talvitie, M. I. Asghar, Hele Savin

Electron Physics Group (EPG)

Research output: Contribution to journal › Article › Scientific › peer-review

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Original language	English
Pages (from-to)	395-400
Journal	Solid State Phenomena
Volume	156-158
Publication status	Published - 2009
MoE publication type	A1 Journal article-refereed

Keywords

boron diffusion gettering
oxygen precipitation
phosphorus diffusion gettering

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savin_effect_of_oxygen_in_2009Accepted author manuscript, 497 KB

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title = "Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon",

keywords = "boron diffusion gettering, oxygen precipitation, phosphorus diffusion gettering, boron diffusion gettering, oxygen precipitation, phosphorus diffusion gettering, boron diffusion gettering, oxygen precipitation, phosphorus diffusion gettering",

author = "Ville V{\"a}h{\"a}nissi and Antti Haarahiltunen and Marki Yli-Koski and H. Talvitie and Asghar, {M. I.} and Hele Savin",

year = "2009",

language = "English",

volume = "156-158",

pages = "395--400",

journal = "Solid State Phenomena",

issn = "1012-0394",

publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

AU - Vähänissi, Ville

AU - Haarahiltunen, Antti

AU - Yli-Koski, Marki

AU - Talvitie, H.

AU - Asghar, M. I.

AU - Savin, Hele

PY - 2009

Y1 - 2009

KW - boron diffusion gettering

KW - oxygen precipitation

KW - phosphorus diffusion gettering

KW - boron diffusion gettering

KW - oxygen precipitation

KW - phosphorus diffusion gettering

KW - boron diffusion gettering

KW - oxygen precipitation

KW - phosphorus diffusion gettering

UR - http://doi.10.4028/www.scientific.net/SSP.156-158.395

M3 - Article

SN - 1012-0394

VL - 156-158

SP - 395

EP - 400

JO - Solid State Phenomena

JF - Solid State Phenomena

ER -

Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Keywords

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