Effect of nitrogen ion-implantation on the tribological properties and hardness of TiN films

R. R. Manory*, C. L. Li, C. Fountzoulas, J. D. Demaree, J. K. Hirvonen, R. Nowak

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)

Abstract

The tribological properties and ultra-micro hardness of ion-implanted TiN films grown by a commercial PVD technique on steel substrates are addressed. The ion-beam treatment was performed using non-mass analyzed nitrogen beam with energy of 100 keV to nominal doses ranging between 0.5 and 6 × 1017 ion cm -2. The analytical techniques employed by us included: Rutherford backscattering (RBS) for depth profile determination, pin-on-disc tests and nano-indentation tests. It was found that the bombardment with nitrogen ions considerably improved the friction coefficient of TiN films except for layers modified with the highest does (6 × 1017 ion cm -2). Examination of virgin and ion-beam bombarded specimens by the ultra-microhardness method revealed differences in mechanical characteristics before and after indentation. The surface deformation results are discussed from the point of view of irradiation induced defects. The hardness data seem to be affected by variations in nitrogen content due to bombarding with nitrogen ions. The analysis of indentation load-depth curves is supported by considerations based on energy principle of indentation.

Original languageEnglish
Pages (from-to)319-327
Number of pages9
JournalMATERIALS SCIENCE AND ENGINEERING A: STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING
Volume253
Issue number1-2
DOIs
Publication statusPublished - 30 Sep 1998
MoE publication typeA1 Journal article-refereed

Keywords

  • Ion implantation
  • TiN film
  • Tribological properties
  • Ultra-microhardness

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