Owing to their excellent radiation tolerance, some of the high-entropy alloys (HEAs) are considered as potential candidates for structural materials in extreme conditions. In order to shed light on the early-stage irradiation damage in HEAs, we performed positron annihilation spectroscopy on hydrogen implanted equiatomic FeMnNiCoCr and interstitial carbon-containing FeMnNiCoCr HEAs. We reveal primary damage as monovacancies in low dose irradiated HEAs. The enhancement of Frenkel pair recombination by C addition is observed in C-containing HEAs. In addition, the C interstitials suppress the vacancy cluster formation in high dose irradiated HEAs.