Effect of growth temperature on the epitaxial growth of ZnO on GaN by ALD

Suvi Särkijärvi, Sakari Sintonen, Filip Tuomisto, Markus Bosund, Sami Suihkonen, Harri Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility