Effect of growth temperature on the epitaxial growth of ZnO on GaN by ALD

Suvi Särkijärvi, Sakari Sintonen, Filip Tuomisto, Markus Bosund, Sami Suihkonen, Harri Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)18-22
Number of pages5
JournalJournal of Crystal Growth
Publication statusPublished - 15 Jul 2014
MoE publication typeA1 Journal article-refereed


  • ALD
  • positron
  • vacancy
  • ZnO

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