Effect of growth conditions on vacancy defects in MOVPE grown AlN thin layers

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Jussi-Matti Mäki
  • Filip Tuomisto

  • Barbara Bastek
  • Frank Bertram
  • Jürgen Christen
  • Armin Dadgar
  • Alois Krost

Research units

  • Otto von Guericke University Magdeburg
  • AZZURRO Semiconductors Ag Magdeburg

Details

Original languageEnglish
Pages (from-to)2575-2577
Number of pages3
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume6
Issue number11
Publication statusPublished - Nov 2009
MoE publication typeA1 Journal article-refereed

    Research areas

  • AlN, MOCVD, positron annihilation, substrate

ID: 3472598