Effect of growth conditions on vacancy defects in MOVPE grown AlN thin layers

Jussi-Matti Mäki, Filip Tuomisto, Barbara Bastek, Frank Bertram, Jürgen Christen, Armin Dadgar, Alois Krost

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2575-2577
Number of pages3
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume6
Issue number11
DOIs
Publication statusPublished - Nov 2009
MoE publication typeA1 Journal article-refereed

Keywords

  • AlN
  • MOCVD
  • positron annihilation
  • substrate

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