Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Research output: Contribution to journalArticleScientificpeer-review


  • Michael Gehl
  • Ricky Gibson
  • Joshua Hendrickson
  • Andrew Homyk
  • Antti Säynätjoki
  • Tapani Alasaarela
  • Lasse Karvonen
  • Ari Tervonen
  • Seppo Honkanen
  • Sander Zandbergen
  • Benjamin C. Richards
  • J.D. Olitzky
  • Axel Scherer
  • Galina Khitrova
  • Hyatt M. Gibbs
  • Ju-Young Kim
  • Yong-Hee Lee

Research units


Original languageEnglish
Pages (from-to)pp. A55-A59
JournalJournal of the Optical Society of America B: Optical Physics
Issue number2
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

ID: 742770