Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Michael Gehl; Ricky Gibson; Joshua Hendrickson; Andrew Homyk; Antti Säynätjoki; Tapani Alasaarela; Lasse Karvonen; Ari Tervonen; Seppo Honkanen; Sander Zandbergen; Benjamin C. Richards; J.D. Olitzky; Axel Scherer; Galina Khitrova; Hyatt M. Gibbs; Ju-Young Kim; Yong-Hee Lee

Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Michael Gehl, Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J.D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, Yong-Hee Lee

Research output: Contribution to journal › Article › Scientific › peer-review

12 Citations (Scopus)

Original language	English
Pages (from-to)	pp. A55-A59
Journal	Journal of the Optical Society of America B: Optical Physics
Volume	29
Issue number	2
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

Cite this

Gehl, M., Gibson, R., Hendrickson, J., Homyk, A., Säynätjoki, A., Alasaarela, T., Karvonen, L., Tervonen, A., Honkanen, S., Zandbergen, S., Richards, B. C., Olitzky, J. D., Scherer, A., Khitrova, G., Gibbs, H. M., Kim, J-Y., & Lee, Y-H. (2012). Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities. Journal of the Optical Society of America B: Optical Physics, 29(2), pp. A55-A59.

Gehl, Michael ; Gibson, Ricky ; Hendrickson, Joshua ; Homyk, Andrew ; Säynätjoki, Antti ; Alasaarela, Tapani ; Karvonen, Lasse ; Tervonen, Ari ; Honkanen, Seppo ; Zandbergen, Sander ; Richards, Benjamin C. ; Olitzky, J.D. ; Scherer, Axel ; Khitrova, Galina ; Gibbs, Hyatt M. ; Kim, Ju-Young ; Lee, Yong-Hee. / Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities. In: Journal of the Optical Society of America B: Optical Physics. 2012 ; Vol. 29, No. 2. pp. pp. A55-A59.

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title = "Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities",

author = "Michael Gehl and Ricky Gibson and Joshua Hendrickson and Andrew Homyk and Antti S{\"a}yn{\"a}tjoki and Tapani Alasaarela and Lasse Karvonen and Ari Tervonen and Seppo Honkanen and Sander Zandbergen and Richards, {Benjamin C.} and J.D. Olitzky and Axel Scherer and Galina Khitrova and Gibbs, {Hyatt M.} and Ju-Young Kim and Yong-Hee Lee",

year = "2012",

language = "English",

volume = "29",

pages = "pp. A55--A59",

journal = "Journal of the Optical Society of America B: Optical Physics",

issn = "0740-3224",

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Gehl, M, Gibson, R, Hendrickson, J, Homyk, A, Säynätjoki, A, Alasaarela, T, Karvonen, L, Tervonen, A, Honkanen, S, Zandbergen, S, Richards, BC, Olitzky, JD, Scherer, A, Khitrova, G, Gibbs, HM, Kim, J-Y & Lee, Y-H 2012, 'Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities', Journal of the Optical Society of America B: Optical Physics, vol. 29, no. 2, pp. pp. A55-A59.

Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities. / Gehl, Michael; Gibson, Ricky; Hendrickson, Joshua; Homyk, Andrew; Säynätjoki, Antti; Alasaarela, Tapani; Karvonen, Lasse; Tervonen, Ari; Honkanen, Seppo; Zandbergen, Sander; Richards, Benjamin C.; Olitzky, J.D.; Scherer, Axel; Khitrova, Galina; Gibbs, Hyatt M.; Kim, Ju-Young; Lee, Yong-Hee.

In: Journal of the Optical Society of America B: Optical Physics, Vol. 29, No. 2, 2012, p. pp. A55-A59.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

AU - Gehl, Michael

AU - Gibson, Ricky

AU - Hendrickson, Joshua

AU - Homyk, Andrew

AU - Säynätjoki, Antti

AU - Alasaarela, Tapani

AU - Karvonen, Lasse

AU - Tervonen, Ari

AU - Honkanen, Seppo

AU - Zandbergen, Sander

AU - Richards, Benjamin C.

AU - Olitzky, J.D.

AU - Scherer, Axel

AU - Khitrova, Galina

AU - Gibbs, Hyatt M.

AU - Kim, Ju-Young

AU - Lee, Yong-Hee

PY - 2012

Y1 - 2012

M3 - Article

VL - 29

SP - pp. A55-A59

JO - Journal of the Optical Society of America B: Optical Physics

JF - Journal of the Optical Society of America B: Optical Physics

SN - 0740-3224

IS - 2

ER -