Original language | English |
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Pages (from-to) | pp. A55-A59 |
Journal | Journal of the Optical Society of America B: Optical Physics |
Volume | 29 |
Issue number | 2 |
Publication status | Published - 2012 |
MoE publication type | A1 Journal article-refereed |
Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities
Michael Gehl, Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J.D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, Yong-Hee Lee
Research output: Contribution to journal › Article › Scientific › peer-review
12
Citations
(Scopus)