Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Michael Gehl, Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J.D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, Yong-Hee Lee

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)pp. A55-A59
    JournalJournal of the Optical Society of America B: Optical Physics
    Volume29
    Issue number2
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Cite this