Original language | English |
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Publication status | Published - 2011 |
MoE publication type | D4 Published development or research report or study |
Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities
M Gehl, Ricky Gibson, J Hendrickson, A Homyk, Tapani Alasaarela, Antti Säynätjoki, Ari Tervonen, Seppo Honkanen, S Zandbergen, B.C Richards, J.D Olitzky, A Scherer, G Khitrova, H.M Gibbs, J.-Y Kim, Y.-H Lee
Research output: Working paper › Professional