Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities

M Gehl; Ricky Gibson; J Hendrickson; A Homyk; Tapani Alasaarela; Antti Säynätjoki; Ari Tervonen; Seppo Honkanen; S Zandbergen; B.C Richards; J.D Olitzky; A Scherer; G Khitrova; H.M Gibbs; J.-Y Kim; Y.-H Lee

Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities

M Gehl, Ricky Gibson, J Hendrickson, A Homyk, Tapani Alasaarela, Antti Säynätjoki, Ari Tervonen, Seppo Honkanen, S Zandbergen, B.C Richards, J.D Olitzky, A Scherer, G Khitrova, H.M Gibbs, J.-Y Kim, Y.-H Lee

Research output: Working paper › Professional

Original language	English
Publication status	Published - 2011
MoE publication type	D4 Published development or research report or study

Cite this

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title = "Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities",

author = "M Gehl and Ricky Gibson and J Hendrickson and A Homyk and Tapani Alasaarela and Antti S{\"a}yn{\"a}tjoki and Ari Tervonen and Seppo Honkanen and S Zandbergen and B.C Richards and J.D Olitzky and A Scherer and G Khitrova and H.M Gibbs and J.-Y Kim and Y.-H Lee",

year = "2011",

language = "English",

type = "WorkingPaper",

}

TY - UNPB

T1 - Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities

AU - Gehl, M

AU - Gibson, Ricky

AU - Hendrickson, J

AU - Homyk, A

AU - Alasaarela, Tapani

AU - Säynätjoki, Antti

AU - Tervonen, Ari

AU - Honkanen, Seppo

AU - Zandbergen, S

AU - Richards, B.C

AU - Olitzky, J.D

AU - Scherer, A

AU - Khitrova, G

AU - Gibbs, H.M

AU - Kim, J.-Y

AU - Lee, Y.-H

PY - 2011

Y1 - 2011

M3 - Working paper

BT - Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities

ER -