Effect of Atomic Layer Deposition on the Quality Factor of Silicon Nanobeam Cavities

M Gehl, Ricky Gibson, J Hendrickson, A Homyk, Tapani Alasaarela, Antti Säynätjoki, Ari Tervonen, Seppo Honkanen, S Zandbergen, B.C Richards, J.D Olitzky, A Scherer, G Khitrova, H.M Gibbs, J.-Y Kim, Y.-H Lee

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2011
    MoE publication typeD4 Published development or research report or study

    Cite this