Effect of annealing in processing of strontium titanate thin films by ALD

Anne Kosola, Matti Putkonen, Leena-Sisko Johansson, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    129 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)102-112
    JournalApplied Surface Science
    Volume211
    Issue number1-4
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • atomic layer desposition
    • B-diketonate
    • strontium titanate
    • thin film

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