Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific


Research units


Original languageEnglish
Title of host publication39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed article in conference proceedings

ID: 678076