Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon

Shuo Li, Päivikki Repo, Guillaume von Gastrow, Yameng Bao, Hele Savin

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

8 Citations (Scopus)
Original languageEnglish
Title of host publication39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed article in conference proceedings

Cite this

Li, S., Repo, P., von Gastrow, G., Bao, Y., & Savin, H. (2013). Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon. In 39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013