Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon

Shuo Li, Päivikki Repo, Guillaume von Gastrow, Yameng Bao, Hele Savin

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

15 Citations (Scopus)

Original language	English
Title of host publication	39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013
Publisher	IEEE
Pages	1265-1267
DOIs	https://doi.org/10.1109/PVSC.2013.6744371
Publication status	Published - 2013
MoE publication type	A4 Conference publication
Event	IEEE Photovoltaic Specialist Conference - Tampa, United States Duration: 17 Jun 2013 → 21 Jun 2013 Conference number: 39

Conference	IEEE Photovoltaic Specialist Conference
Country/Territory	United States
City	Tampa
Period	17/06/2013 → 21/06/2013

Access to Document

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title = "Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon",

author = "Shuo Li and P{\"a}ivikki Repo and {von Gastrow}, Guillaume and Yameng Bao and Hele Savin",

year = "2013",

doi = "10.1109/PVSC.2013.6744371",

language = "English",

pages = "1265--1267",

booktitle = "39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013",

publisher = "IEEE",

address = "United States",

note = "IEEE Photovoltaic Specialist Conference ; Conference date: 17-06-2013 Through 21-06-2013",

}

Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon. / Li, Shuo; Repo, Päivikki; von Gastrow, Guillaume et al.
39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013. IEEE, 2013. p. 1265-1267.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon

AU - Li, Shuo

AU - Repo, Päivikki

AU - von Gastrow, Guillaume

AU - Bao, Yameng

AU - Savin, Hele

N1 - Conference code: 39

PY - 2013

Y1 - 2013

U2 - 10.1109/PVSC.2013.6744371

DO - 10.1109/PVSC.2013.6744371

M3 - Conference article in proceedings

SP - 1265

EP - 1267

BT - 39th IEEE Photovoltaic Specialist Conference, Tampa, USA June 17-21, 2013

PB - IEEE

T2 - IEEE Photovoltaic Specialist Conference

Y2 - 17 June 2013 through 21 June 2013

ER -