Economical device for measuring thickness of a thin polymer film

K. Hirvi; Tapio Mäkelä; J. Pekola; M. Paalanen

doi:10.1063/1.1144609

Economical device for measuring thickness of a thin polymer film

K. Hirvi^*, Tapio Mäkelä, J. Pekola, M. Paalanen

^*Corresponding author for this work

Not published at Aalto University

University of Jyväskylä

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Abstract

An inexpensive device (about $2K) for thickness measurements of thin (

Original language	English
Pages (from-to)	2735-2736
Number of pages	2
Journal	Review of Scientific Instruments
Volume	65
Issue number	8
DOIs	https://doi.org/10.1063/1.1144609
Publication status	Published - 1994
MoE publication type	A1 Journal article-refereed

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AU - Paalanen, M.

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Economical device for measuring thickness of a thin polymer film

Abstract

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