Economical device for measuring thickness of a thin polymer film

K. Hirvi*, T. Mäkelä, J. Pekola, M. Paalanen

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

An inexpensive device (about $2K) for thickness measurements of thin (

Original languageEnglish
Pages (from-to)2735-2736
Number of pages2
JournalReview of Scientific Instruments
Volume65
Issue number8
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

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