E-beam fabrication of diffractive elements

E. Tervonen, J. Turunen, J. Pekola, M. Paalanen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationUniversity of Helsinki Report Series in Physics
Place of PublicationHelsinki
PublisherFinnish Physical Society, University of Helsinki
Pages10
Publication statusPublished - 1994
MoE publication typeA4 Article in a conference publication

Keywords

  • diffraction
  • gratings
  • lithography

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