@inproceedings{f458fbddeb3f4b929bd760b62fd01ee6,
title = "Dynamic modelling and simulation of microelectromechanical devices with a circuit simulation program",
keywords = "accelerometer model, equivalent circuit model, microelectromechanical model, accelerometer model, equivalent circuit model, microelectromechanical model, accelerometer model, equivalent circuit model, microelectromechanical model",
author = "T. Veijola and H. Kuisma and J. Lahdenper{\"a}",
year = "1998",
language = "English",
pages = "245--250",
booktitle = "1998 Int. Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, Santa Clara, USA, 6-8.4.1998",
}