Dynamic modelling and simulation of microelectromechanical devices with a circuit simulation program

T. Veijola, H. Kuisma, J. Lahdenperä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication1998 Int. Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, Santa Clara, USA, 6-8.4.1998
    Place of PublicationSanta Clara, USA
    Pages245-250
    Publication statusPublished - 1998
    MoE publication typeA4 Article in a conference publication

    Keywords

    • accelerometer model
    • equivalent circuit model
    • microelectromechanical model

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