Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices

K. Hanhijärvi, Juha Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, S. Franssila, E. Haeggström

    Research output: Working paperProfessional

    1 Citation (Scopus)
    Original languageEnglish
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameSPIE, Munich, Germany 2009

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