Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

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