Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)085009
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number8
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Keywords

  • DRIE
  • FIB
  • MEMS

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