Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Nikolai Chekurov; Kestutis Grigoras; Lauri Sainiemi; Antti Peltonen; Ilkka Tittonen; Sami Franssila

doi:10.1088/0960-1317/20/8/085009

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Original language	English
Pages (from-to)	085009
Journal	Journal of Micromechanics and Microengineering
Volume	20
Issue number	8
DOIs	https://doi.org/10.1088/0960-1317/20/8/085009
Publication status	Published - 2010
MoE publication type	A1 Journal article-refereed

Keywords

DRIE
FIB
MEMS

Access to Document

10.1088/0960-1317/20/8/085009

http://iopscience.iop.org/0960-1317/20/8/085009/

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Cite this

@article{d70aee11e5904f9b92fbcc89c7c94da2,

title = "Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching",

keywords = "DRIE, FIB, MEMS, DRIE, FIB, MEMS, DRIE, FIB, MEMS",

author = "Nikolai Chekurov and Kestutis Grigoras and Lauri Sainiemi and Antti Peltonen and Ilkka Tittonen and Sami Franssila",

year = "2010",

doi = "10.1088/0960-1317/20/8/085009",

language = "English",

volume = "20",

pages = "085009",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

number = "8",

}

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching. / Chekurov, Nikolai; Grigoras, Kestutis; Sainiemi, Lauri; Peltonen, Antti ; Tittonen, Ilkka ; Franssila, Sami.

In: Journal of Micromechanics and Microengineering, Vol. 20, No. 8, 2010, p. 085009.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

AU - Chekurov, Nikolai

AU - Grigoras, Kestutis

AU - Sainiemi, Lauri

AU - Peltonen, Antti

AU - Tittonen, Ilkka

AU - Franssila, Sami

PY - 2010

Y1 - 2010

KW - DRIE

KW - FIB

KW - MEMS

KW - DRIE

KW - FIB

KW - MEMS

KW - DRIE

KW - FIB

KW - MEMS

UR - http://iopscience.iop.org/0960-1317/20/8/085009/

U2 - 10.1088/0960-1317/20/8/085009

DO - 10.1088/0960-1317/20/8/085009

M3 - Article

VL - 20

SP - 085009

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 8

ER -

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Keywords

Access to Document

Raw Materials Research Infrastructure

Cite this