| Original language | English |
|---|---|
| Pages | 13 |
| Publication status | Published - 2003 |
| MoE publication type | D4 Published development or research report or study |
Publication series
| Name | MICRO Tec 2003, Münich, Germany, October 13-15 2003 |
|---|
Keywords
- SU-8 microparts
S. Corral, Q. Zhou, A. Albut, S. Franssila, S. Tuomikoski, H. Koivo
Research output: Working paper › Professional
| Original language | English |
|---|---|
| Pages | 13 |
| Publication status | Published - 2003 |
| MoE publication type | D4 Published development or research report or study |
| Name | MICRO Tec 2003, Münich, Germany, October 13-15 2003 |
|---|