DLC-PDMS-hybrid patterning and surface treatment

T. Laakso, A. Soininen, S. Franssila

Research output: Contribution to journalArticleProfessional

Original languageEnglish
Pages (from-to)103-105
JournalProceedings MicroTAS
Volume2
Publication statusPublished - 2004
MoE publication typeD1 Article in a trade journal

Keywords

  • dlc-pdms-hybrid

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