Direct optical measurement of the Q values of RF-MEMS resonators

Olli Holmgren, Kimmo Kokkonen, Ville Kaajakari, Aarne Oja, Jouni V. Knuuttila

Research output: Working paperProfessional

12 Citations (Scopus)
Original languageEnglish
Publication statusPublished - 2005
MoE publication typeD4 Published development or research report or study

Publication series

Name2005 IEEE Ultrasonics Symposium, Rotterdam, Alankomaat, 18 - 21.9.2005

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