Direct optical measurement of the Q values of RF-MEMS resonators

Olli Holmgren, Kimmo Kokkonen, Ville Kaajakari, Aarne Oja, Jouni V. Knuuttila

Research output: Working paper › Professional

12 Citations (Scopus)

Original language	English
Publication status	Published - 2005
MoE publication type	D4 Published development or research report or study

Name	2005 IEEE Ultrasonics Symposium, Rotterdam, Alankomaat, 18 - 21.9.2005

Cite this

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title = "Direct optical measurement of the Q values of RF-MEMS resonators",

author = "Olli Holmgren and Kimmo Kokkonen and Ville Kaajakari and Aarne Oja and Knuuttila, {Jouni V.}",

year = "2005",

language = "English",

series = "2005 IEEE Ultrasonics Symposium, Rotterdam, Alankomaat, 18 - 21.9.2005",

type = "WorkingPaper",

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T1 - Direct optical measurement of the Q values of RF-MEMS resonators

AU - Holmgren, Olli

AU - Kokkonen, Kimmo

AU - Kaajakari, Ville

AU - Oja, Aarne

AU - Knuuttila, Jouni V.

PY - 2005

Y1 - 2005

M3 - Working paper

T3 - 2005 IEEE Ultrasonics Symposium, Rotterdam, Alankomaat, 18 - 21.9.2005

BT - Direct optical measurement of the Q values of RF-MEMS resonators

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