@techreport{0c1d75eab5a04f14a0d322554781ed91,
title = "Diffusion behavior of metal impurities and gettering efficiency: A review of publications",
keywords = "gettering, impurity diffusion, silicon wafers, gettering, impurity diffusion, silicon wafers, gettering, impurity diffusion, silicon wafers",
author = "Martti Palokangas",
year = "2002",
language = "English",
series = "Reports in Electron Physics",
publisher = "Helsinki University of Technology",
number = "30",
type = "WorkingPaper",
institution = "Helsinki University of Technology",
}