Diffusion Barrier Performance on Thin Cr Films in the Cu/Cr/Si Structure

Y. Ezer, Jaakko Härkönen, S. Arpiainen, V. Sokolov, P. Kuivalainen, J. Saarilahti, J. Kaitila

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)228-231
JournalPhysica Scripta
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed


  • Chromium
  • Copper
  • Diffusion Barrier
  • Silicon

Cite this