Diffusion Barrier Performance on Thin Cr Films in the Cu/Cr/Si Structure

Y. Ezer; Jaakko Härkönen; S. Arpiainen; V. Sokolov; P. Kuivalainen; J. Saarilahti; J. Kaitila

Diffusion Barrier Performance on Thin Cr Films in the Cu/Cr/Si Structure

Y. Ezer, Jaakko Härkönen, S. Arpiainen, V. Sokolov, P. Kuivalainen, J. Saarilahti, J. Kaitila

Department of Electrical Engineering and Automation

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	228-231
Journal	Physica Scripta
Volume	T79
Publication status	Published - 1999
MoE publication type	A1 Journal article-refereed

Keywords

Chromium
Copper
Diffusion Barrier
Silicon

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Cite this

@article{6ba24a5fea154d8faadf6700e60637f9,

title = "Diffusion Barrier Performance on Thin Cr Films in the Cu/Cr/Si Structure",

keywords = "Chromium, Copper, Diffusion Barrier, Silicon, Chromium, Copper, Diffusion Barrier, Silicon, Chromium, Copper, Diffusion Barrier, Silicon",

author = "Y. Ezer and Jaakko H{\"a}rk{\"o}nen and S. Arpiainen and V. Sokolov and P. Kuivalainen and J. Saarilahti and J. Kaitila",

year = "1999",

language = "English",

volume = "T79",

pages = "228--231",

journal = "Physica Scripta ",

issn = "0031-8949",

publisher = "Institute of Physics Publishing ",

}

TY - JOUR

T1 - Diffusion Barrier Performance on Thin Cr Films in the Cu/Cr/Si Structure

AU - Ezer, Y.

AU - Härkönen, Jaakko

AU - Arpiainen, S.

AU - Sokolov, V.

AU - Kuivalainen, P.

AU - Saarilahti, J.

AU - Kaitila, J.

PY - 1999

Y1 - 1999

KW - Chromium

KW - Copper

KW - Diffusion Barrier

KW - Silicon

KW - Chromium

KW - Copper

KW - Diffusion Barrier

KW - Silicon

KW - Chromium

KW - Copper

KW - Diffusion Barrier

KW - Silicon

M3 - Article

VL - T79

SP - 228

EP - 231

JO - Physica Scripta

JF - Physica Scripta

SN - 0031-8949

ER -