@article{89c8980a39ce48cda1178352dda5868d,
title = "Diffusion Barrier performance of thin Cr films in the Cu/Cr/Si structure",
keywords = "electronic materials, multilayers, sputtering, thin films, electronic materials, multilayers, sputtering, thin films, electronic materials, multilayers, sputtering, thin films",
author = "Y. Ezer and J. H{\"a}rk{\"o}nen and V. Sokolov and J. Saarilahti and J. Kaitila and P. Kuivalainen",
year = "1998",
language = "English",
volume = "33",
pages = "1331--1337",
journal = "Materials Research Bulletin",
issn = "0025-5408",
publisher = "Elsevier Ltd",
number = "9",
}