Diffusion Barrier performance of thin Cr films in the Cu/Cr/Si structure

Y. Ezer, J. Härkönen, V. Sokolov, J. Saarilahti, J. Kaitila, P. Kuivalainen

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)1331-1337
JournalMaterials Research Bulletin
Volume33
Issue number9
Publication statusPublished - 1998
MoE publication typeA1 Journal article-refereed

Keywords

  • electronic materials
  • multilayers
  • sputtering
  • thin films

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