Diffractive shaping of excimer-laser beams for pulsed laser deposition

Antti Hakola, Timo Kajava, Henna Elfström, Janne Simonen, Pertti Pääkkönen, Jari Turunen

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationEspoo
Pages4
Publication statusPublished - 2006
MoE publication typeD4 Published development or research report or study

Publication series

NameTeknillisen korkeakoulun teknillisen fysiikan julkaisuja
PublisherTeknillinen korkeakoulu
No.TKK-F-A843
ISSN (Print)1456-3320

Keywords

  • beam shaping
  • diffractive grating
  • excimer laser
  • flat-top profile

Cite this

Hakola, A., Kajava, T., Elfström, H., Simonen, J., Pääkkönen, P., & Turunen, J. (2006). Diffractive shaping of excimer-laser beams for pulsed laser deposition. (pp. 4). (Teknillisen korkeakoulun teknillisen fysiikan julkaisuja; No. TKK-F-A843).