Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen; A. Hakola; T. Kajava

doi:10.2971/jeos.2011.11013s

Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen^*, A. Hakola, T. Kajava

^*Corresponding author for this work

Department of Applied Physics

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Abstract

We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm² flat-top distributions of UV light with a fluence of 3 J/cm² on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

Original language	English
Article number	11013s
Number of pages	5
Journal	Journal of the European Optical Society
Volume	6
DOIs	https://doi.org/10.2971/jeos.2011.11013s
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

Keywords

Beam-splitter grating
Flat-top profile
Partial coherence
Top-hat profile

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title = "Diffractive shaping of excimer-laser beams for pulsed laser deposition",

abstract = "We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.",

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AU - Hakola, A.

AU - Kajava, T.

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N2 - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

AB - We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

KW - Beam-splitter grating

KW - Flat-top profile

KW - Partial coherence

KW - Top-hat profile

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DO - 10.2971/jeos.2011.11013s

M3 - Article

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JF - Journal of the European Optical Society: Rapid Publications

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ER -

Diffractive shaping of excimer-laser beams for pulsed laser deposition

Abstract

Keywords

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