Diffractive shaping of excimer-laser beams for pulsed laser deposition

V. Kekkonen*, A. Hakola, T. Kajava

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)


We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.

Original languageEnglish
Article number11013s
Number of pages5
JournalJournal of the European Optical Society
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed


  • Beam-splitter grating
  • Flat-top profile
  • Partial coherence
  • Top-hat profile


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