Abstract
We present a beam-shaping system for a pulsed laser deposition setup. This system is based on two diffractive beam-splitter gratings and is able to produce 2 × 2 mm2 flat-top distributions of UV light with a fluence of 3 J/cm2 on the target some 30 cm behind the system. We have applied the setup to deposit ferromagnetic Ni-Mn-Ga films.
Original language | English |
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Article number | 11013s |
Number of pages | 5 |
Journal | Journal of the European Optical Society |
Volume | 6 |
DOIs | |
Publication status | Published - 2011 |
MoE publication type | A1 Journal article-refereed |
Keywords
- Beam-splitter grating
- Flat-top profile
- Partial coherence
- Top-hat profile