Diffractive shaping of excimer laser beams

J. Turunen, Pertti Pääkkönen, M. Kuittinen, P. Laakkonen, J. Simonen, Timo Kajava, M. Kaivola

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)2467-2475
Number of pages9
JournalJournal of Modern Optics
Volume47
Issue number13
DOIs
Publication statusPublished - 2000
MoE publication typeA1 Journal article-refereed

Keywords

  • beam shaping
  • diffractive optics
  • excimer lasers
  • flat top generation
  • partial coherence

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