@article{7a2a2f24d4474d519aefb82e8f5b2b45,
title = "Diffractive shaping of excimer laser beams",
keywords = "beam shaping, diffractive optics, excimer lasers, flat top generation, partial coherence, beam shaping, diffractive optics, excimer lasers, flat top generation, partial coherence, beam shaping, diffractive optics, excimer lasers, flat top generation, partial coherence",
author = "J. Turunen and Pertti P{\"a}{\"a}kk{\"o}nen and M. Kuittinen and P. Laakkonen and J. Simonen and Timo Kajava and M. Kaivola",
year = "2000",
doi = "10.1080/095003400428212",
language = "English",
volume = "47",
pages = "2467--2475",
journal = "Journal of Modern Optics",
issn = "0950-0340",
number = "13",
}