Diffractive shaping of excimer-laser beams

Antti Hakola, Timo Kajava, Henna Elfström, Pertti Pääkkönen, Jari Turunen

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationBergen
Pages162
Publication statusPublished - 2006
MoE publication typeD4 Published development or research report or study

Publication series

NameNorthern Optics 2006, Bergen, Norja, 14.-16.6.2006
PublisherUniK, FFI, NTNU, and University of Bergen

Keywords

  • beam shaping
  • diffractive grating
  • excimer laser
  • flat-top profile

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