Diffraction imaging of microdefects in Czochralski silicon

T. Tuomi, P.J. McNally, D. Lowney, Peter Becker

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHampuri
    Pages835-836
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameHASYLAB-DESY Annual Report, 2001, Part I

    Keywords

    • semiconductors
    • synchrotron x-ray topography

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