@article{e59eb098fdb640069e64effa45b35d74,
title = "Differential open resonator method for permittivity measurements of thin dielectric film on substrate",
keywords = "open resonator, permittivity, substrate, thin film, open resonator, permittivity, substrate, thin film, open resonator, permittivity, substrate, thin film",
author = "Dudorov, {Sergey N.} and Lioubtchenko, {Dmitri V.} and Mallat, {Juha A.} and R{\"a}is{\"a}nen, {Antti V.}",
year = "2005",
language = "English",
volume = "54",
pages = "1916--1920",
journal = "IEEE Transactions of Instrumentation and Measurement",
issn = "0018-9456",
publisher = "IEEE",
number = "5",
}