Differential open resonator method for permittivity measurements of thin dielectric film on substrate

Sergey N. Dudorov, Dmitri V. Lioubtchenko, Juha A. Mallat, Antti V. Räisänen

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1916-1920
    JournalIEEE Transactions on Instrumentation and Measurement
    Volume54
    Issue number5
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Keywords

    • open resonator
    • permittivity
    • substrate
    • thin film

    Cite this