Determination of thin film parameters from high accuracy spectrophotometric measurements

Saulius Nevas; Farshid Manoocheri; Erkki Ikonen

Determination of thin film parameters from high accuracy spectrophotometric measurements

Saulius Nevas, Farshid Manoocheri, Erkki Ikonen

Research output: Working paper › Professional

Original language	English
Publication status	Published - 2002
MoE publication type	D4 Published development or research report or study

Publication series

Name	4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002

Cite this

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title = "Determination of thin film parameters from high accuracy spectrophotometric measurements",

author = "Saulius Nevas and Farshid Manoocheri and Erkki Ikonen",

year = "2002",

language = "English",

series = "4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002",

type = "WorkingPaper",

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T1 - Determination of thin film parameters from high accuracy spectrophotometric measurements

AU - Nevas, Saulius

AU - Manoocheri, Farshid

AU - Ikonen, Erkki

PY - 2002

Y1 - 2002

M3 - Working paper

T3 - 4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002

BT - Determination of thin film parameters from high accuracy spectrophotometric measurements

ER -