Determination of thin film parameters from high accuracy spectrophotometric measurements

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 2002
MoE publication typeD4 Published development or research report or study

Publication series

Name4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002

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